Fixtures for PVD systems
Manufactured upon Order
Medium sized gearboxes for 6 substrates (<500g) on a PCD of 84mm.
Suitable for square planet shafts V20 (20mm x 15mm) and on planets with at least Ø127mm.
Substrate holdings are Ø30mm magnet pins. Fixed housing.
Medium sized gearboxes for 7 substrates (<500g) on a PCD of 92mm.
Suitable for square planet shafts V20 (20mm x 20mm) and on planets with at least Ø127mm.
Substrate holdings are Ø8mm pins. Removable cover.
Heavy sized gearbox for 10 substrates (< 4kg) on a PCD of 99mm.
Suitable for square planet shaft V20 (20mm x 20mm) and on planets with at least Ø127mm.
Substrate holdings are Ø8mm wedges. Fixed housing.
Medium sized gearboxes for 5 substrates (<500g) on a PCD of 84mm.
Suitable for square planet shafts V15 (15mmx15mm) and on planets with at least Ø128mm.
Substrate holdings are Ø32mm magnet pins. Removable cover.
Medium sized gearboxes for 12 substrates (<500g) on a PCD of 101mm.
Suitable for square planet shafts V15 (15mm x 15mm) and on planets with at least Ø128mm.
Substrate holdings are Ø12mm magnet pins. Removable cover.
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Light weight gearbox for 16 substrates (<250g) on a PCD 108mm.
Suitable for square planet shafts V15 (15mm x 15mm) and on planets with at least Ø128mm. Substrate holdings are Ø8mm pins. Removable cover.
Slowly rotating gearbox for 18 light substrates (<50g) on a PCD 112mm.
Substrate holdings are Ø8mm magnet pins. Removable cover.
Substrate holdings are Ø5mm pins. Removable cover.
Slowly rotating gearbox for 22 light substrates (<50g) on a PCD 110mm.
Suitable for square planet shafts V15 (15 mm x 15mm) and on planets with at least Ø128mm.