Fixtures for PVD systems
Manufactured upon Order
Slowly rotating gearbox for 28 light substrates (<50g) on aPCD 157mm.
Suitable for hexagonal rod SW16 and on planets with at least Ø178mm.
Substrate holdings are Ø5mm pins. Removable cover.
Suitable for square planet shafts V20 (20mm x 20mm) and on planets with at least Ø178mm.
Slowly rotating gearbox for 32 light substrates (<50g) on a PCD 110mm.
Suitable for square planet shafts V15 (15mm x 15mm) and on planets with at least Ø128mm.
Substrate holdings are Ø8mm magnet pins. Removable cover.
Slowly rotating gearbox for 32 light substrates (<50g) on a PCD 112mm.
Slowly rotating gearbox for 34 light substrates (<50g) on a PCD 109mm.
Suitable for hexagon planet shafts SW19 and on planets with at least Ø125mm.
Slowly rotating gearbox for 36 light substrates (<50g) on a PCD 112mm.
Slowly rotating gearbox for 36 light substrates (<50g) on a PCD 212 mm.
Suitable for 15x15 mm planet shafts V15 and on planets with at least Ø 234 mm.
Substrate holdings are magnet pins. Removable cover.