Fixtures for PVD systems
Manufactured upon Order
Sphere Plate for 32 sleeves up to shank diameter Ø06 (sleeve OD = 08mm).For planets of diameter Ø125mm (for L1= 48mm) up to Ø180mm (for L1=130mm)Tilt angle 20°, stack height per level = 33mm (plus approx. 1 x L1 for the last level)
