Fixtures for PVD systems
Sphere Plate for 16 sleeves up to Ø10 shanks (sleeve OD = 12mm). For planets of diameter Ø120mm (for L1= 58mm) up to Ø170mm (for L1=128mm). Tilt angle 20°, stack height per level = 42mm (plus approx. 1 x L1 for the last level).
